Abstract
In this paper, a planar type micro electromagnetic distance sensor has been developed for the distance sensor of micro mobile robot. So far, because of the use of common photoresist, the thickness of the sensors has in the past only reached several /spl mu/m. Therefore the sensors fabricated had low measuring accuracy. In order to obtain high sensitivity, using ultrathick high aspect ratio photoresist SU-8, a 300-/spl mu/m-thick microcoil has been fabricated by micromachining technique based on sputtering and electroplating methods. The microcoil has a spiral planar ultrathick structure. The static characteristics and frequency response of the microcoil have been measured, and sensitivity and position control of the microcoil were determined. The experimental results show that the electromagnetic distance sensor has wide frequency response and high measuring accuracy.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
