Abstract
CALDER (Cryogenic wide-Area Light Detectors with Excellent Resolution) is a project for the development of large area phonon mediated KIDs (Kinetic Inductance Detectors), for the detection of Cherenkov radiation emitted in TeO2 bolometers to search for neutrinoless double beta decay (0νββ). The KIDs are superconducting detectors made of high quality factor superconducting resonators, which are coupled to a transmission line for signal readout. We designed and fabricated KIDs using aluminum. The Al thin films (40nm) were evaporated on Si(100) high resistivity silicon wafers using an electron beam evaporator in a HV chamber. In this work we report the steps of the fabrication process. All devices are made in direct-write using Electron Beam Lithography (EBL), positive tone resist poly-methyl methacrylate (PMMA) and lift off process. In order to improve the sensitivity of the detectors we have started recently to use sub-stoichiometric TiN deposited by means of DC magnetron sputtering and we will optimize a different fabrication process.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
