Abstract
The Ta2O5 thin film is a novel piezoelectric thin film, and its application as a surface acoustic wave communication element is expected. Thus, we attempted to grow the single crystal thin film on an amorphous substrate. In this study, a uniaxial orientation film was established on both an amorphous substrate and a single crystal substrate using the RF sputtering method. A new heating method for fabricating a single crystal thin film was proposed, and the basic examination was carried out. As a result, a high-quality crystal thin film was obtained on both kinds of substrates.
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