Abstract
The authors present the fabrication of suspended antenna-coupled nanothermocouples (ACNTCs) over a cavity formed from an Si substrate by XeF2 etching. They observe a 100-fold increase in the response of such suspended ACNTCs, which is due to two factors: (1) the quasihemispherical shape of the cavity may result in constructive interference of the incident radiation reflected back to the antenna and (2) the cavity provides thermal isolation of the thermocouple from the substrate. The characteristics of Si etched with XeF2 are discussed for micrometer-scale cavities ranging from 1.5 to 25 μm deep. Polarization-dependent measurements are presented, and the authors show that the responses of the suspended single- and bi-metal ACNTCs are 100 times larger than similar devices on a substrate, i.e., without a cavity.
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