Fabrication of surface micromachined molybdenum cantilever beams for PWM MEMS pressure sensor and issues that affect yield

Abstract

This paper illustrates the methodology adopted for the molybdenum cantilever beam fabrication and the issues faced in the successful realization of such a beam which would be essential component of the PWM based MEMS pressure sensor. The authors in this work have initially fabricated the MEMS mechanical switch with molybdenum cantilever beam using surface micromachining technique. The molybdenum beam switch has been successfully implemented with the proposed fabrication process. However, the yield is poor. The issue regarding the poor yield has been discussed and methods to overcome the same for the enhancement of yield have been presented.