Abstract
Microswellings of 1 µm height, 1.5 µm diameter, and regular intervals of 2.5 µm on a silicone rubber surface were fabricated using a 193 nm ArF excimer laser. The laser was focused on silicone by each microsphere made of silica glass of 2.5 µm diameter; these microspheres covered the entire surface of the silicone. The surface underneath each microsphere selectively swelled owing to the photodissociation of the Si–O bonds of silicone. The contact angle of water was measured to be approximately 155°, indicating a clear superhydrophobicity. The samples successfully repelled water in water to form an air gap layer between silicone and water.
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