Abstract

Our laboratory has reported that periodic micro swelling structures on silicone rubber surfaces are photochemically formed, and the surface has superhydrophobicity. At the conference, the formation of capsule structures on the top of periodic micro swelling structures on silicone rubber surface by 193 nm ArF excimer laser irradiation will be reported. The microcapsule structure is formed by irradiating the silicone rubber with silica microspheres aligned in a single layer with the 193 nm ArF excimer laser. The formation method and the nature of the microcapsule structure will be discussed.

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