Abstract
Intrinsic Josephson junction (IJJ) stacks of cuprate superconductors have potential to be implemented as intrinsic phase qubits working at relatively high temperatures. We report success in fabricating submicron La2−xSrxCuO4 (LSCO) IJJ stacks carved out of single crystals. We also show a new fabrication method in which argon ion etching is performed after focused ion beam etching. As a result, we obtained an LSCO IJJ stack in which resistive multibranches appeared. It may be possible to control the number of stacked IJJs with an accuracy of a single IJJ by developing this method.
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