Abstract
Using polymer droplets formed in dewetting of polymer film on silicon surface as template, the silicon columns capped with circular polymer plates are fabricated via plasma etching. By blanket deposition of a gold layer on the structure, an array of metallic microcavities featured by a metal circular plate separated by a silicon column with the bottom metallic film is achieved. The geometrical parameters of the stereo structures can be tuned. We show that the electric field at the edge of the cap is greatly enhanced, which can be used as the hot spot for trace amount of chemical detection.
Highlights
Using polymer droplets formed in dewetting of polymer film on silicon surface as template, the silicon columns capped with circular polymer plates are fabricated via plasma etching
Surface plasmon polariton (SPP) is the collective oscillation of free electrons on the metal–dielectric interface driven by the incident electromagnetic waves
Despite the strong loss of the metallic structure, the local SPP resonance on metallic structure remains very strong, which makes it possible to apply these structures as sensing devices
Summary
Using polymer droplets formed in dewetting of polymer film on silicon surface as template, the silicon columns capped with circular polymer plates are fabricated via plasma etching. By blanket deposition of a gold layer on the structure, an array of metallic microcavities featured by a metal circular plate separated by a silicon column with the bottom metallic film is achieved.
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