Fabrication of Small Fluorescence Scale Patterns by Electron Beam Drawing Using Polymer Film Containing Fluorescence Dye

Abstract

We report the fabrication of a resolution–evaluation chart and a scale for a fluorescence microscope. Small fluorescence patterns were fabricated by irradiating an electron beam (EB) in a thin film prepared by dispersing fluorescence dye (rhodamine 590) in poly(methyl methacrylate) (PMMA) and by development to remove EB-irradiated parts. As a result, the fluorescence emission pattern of nanometer order (a line width of 110 nm and a line interval of 370 nm) with sufficient fluorescence intensity was obtained, and a 1 μm bright fluorescence scale for the laser scanning fluorescence microscope was fabricated. These fluorescence patterns are handled easily and are effective for measurement using a fluorescence microscope.