Abstract

Sm-based perovskite-type oxide (SmMeO3: Me = Cr, Mn, Fe, Co) thin-films could be synthesized by a wet-chemical method using an acetylacetone—Poly(Vinyl Pyrrolidone) (PVP) polymeric precursor method at 750℃. The perovskite-type oxide thin-films were tried to apply an acetylene gas sensor based on AC impedance spectroscopy. Among the oxides tested, SmFeO3 thin-film sensor showed good sensor responses in which the AC impedance at 20 kHz was depending on acetylene gas concentration between 2 ppm and 80 ppm at 400℃.

Highlights

  • Lanthanoid-based perovskite-type oxides, such as LnMeO3 (Ln: lanthanoids, Me: transition metals), have been well-known as functional inorganic materials having a wide range of applications for electrode materials of the alkaline fuel cell [1], gas sensor [2,3,4,5,6,7,8,9,10], ion sensor [11], and for high-performance catalysts for the complete oxidation of hydrocarbons or CO, and NO reduction [12]

  • Sm-based perovskite-type oxide (SmMeO3: Me = Cr, Mn, Fe, Co) thin-films could be synthesized by a wet-chemical method using an acetylacetone—Poly(Vinyl Pyrrolidone) (PVP) polymeric precursor method at 750 ̊C

  • The perovskitetype oxide thin-films were tried to apply an acetylene gas sensor based on AC impedance spectroscopy

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Summary

Introduction

Lanthanoid-based perovskite-type oxides, such as LnMeO3 (Ln: lanthanoids, Me: transition metals), have been well-known as functional inorganic materials having a wide range of applications for electrode materials of the alkaline fuel cell [1], gas sensor [2,3,4,5,6,7,8,9,10], ion sensor [11], and for high-performance catalysts for the complete oxidation of hydrocarbons or CO, and NO reduction [12]. Oxide thin-film with a perovskite-type structure have been prepared by dry processes such as sputtering and electron-beam deposition methods [17,18], as well as the wet processes of the sol-gel method mainly starting from metal alkoxides or organic acid salts [19,20]. They can field high-quality oxide thin-films; they still have some problems, such as relatively low cost performance and lack of handling of the chemicals using the sol-gel method. The Sm-based perovskite-type oxide thinfilm as the material of an acetylene sensor was picked up and systematically evaluated about wet-chemical synthesize of perovskite-type oxide thin-film [26] and the C2H2 sensing properties of the prepared oxide thin-film

Synthesis of Perovskite-Type Oxide Thin-Films
Fabrication of Sensor Devices
Preparation of Perovskite-Type Oxide Thin-Films
Gas Sensing Properties
Conclusion
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