Abstract
The feasibility of fabricating a thermionic cathode with controlled pore geometry via projection ion lithography is demonstrated in this paper. The advantages of such cathodes over the porous-plug type currently in use are described, followed by a brief description of the pinhole ion lens and its general applications. Examples of controlled pore images produced in substrates and refractory metal foils using different variations of the pinhold ion lens technique are given. The technique used for etching slots is described, and slot arrays etched in rhenium foil, tungsten foil, and in the front surface of a controlled pore dispenser cathode are examined. The slots produced ranged from 13 μm wide by 580 μm long in rhenium to 6 μm wide by 64 μm long in tungsten.
Published Version
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