Fabrication of quasi-periodic surface microcavities by selective etching of self-organized superalloys for high-temperature photonics

Abstract

Large-area fabrication of periodic microstructures on refractory metals surface is a key technology supporting the practical application of spectrally controlled thermal radiation using surface microcavities. This report describes large-area fabrication of two-dimensional submicron quasi-periodic microcavities using self-organization on a nickel-based superalloy. The surface microcavities on a bulk metal are obtained by heat treatment and simple chemical etching. The emission peak attributed to the confined modes inside cavities can be tuned by controlling the microcavity size from 0.27 to 0.53 μm. Emittance enhancement and thermal stability are also confirmed at 973 K.