Abstract
Flexible quartz fibers (cross-section: 1 mm x 0.1 mm) were developed as one-dimensional substrates for fiber-electronic devices such as OLEDs. Fine and uniform poly-Si films were deposited on moving fibers in an open-tube CVD system. Si films (thicknesses: 50 nm and 100 nm) were directly re-crystallized by green laser annealing without ablation. Top-gate type TFTs were fabricated and proper operation was confirmed with the electron field effect mobility of 177 cm2/Vs.
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