Fabrication of Photonic Crystal Structures by Femtosecond Laser-Induced Photopolymerization of Organic-Inorganic Film

Abstract

We report on a fabrication of photonic crystal structures in organic-inorganic hybrid films by a laser interference technique. Films containing the methacrylic group, which is photopolymerable by an adequate laser light, are prepared using a sol-gel technique from a mixture of organosilicate alkoxide and zirconium alkoxide modified by methacrylic acid. For the photopolymerization, the coated films on glass substrate are exposed to the interference light which is arranged with a square lattice in about 1 μm spacing. From microscopic images of microstructures produced by the photopolymerization, the influence of changes in conditions such as pre-bake temperature, photoinitiator and irradiation energy (laser power and duration time) on periodic structure is investigated. Adjusting the conditions, 2D and 3D photonic crystal structures with the micrometer-order period are formed in organo-silicate-zirconate hybrid materials.