An ICP Etching Tool for Accurate Fabrication of Photonic Crystal Structures

Abstract

Abstract : This report summarizes the use of the AFOSR a DURIP grant for obtaining an ICP etching tool to add state-of-the-art fabrication tool to prof. Adibi's research group at the Georgia Institute of Technology to improve the fabrication quality of nano and micro photonic structures for chip-scale integrated photonic circuits. Since this grant is primarily focused on obtaining a major piece of equipment, this report summarizes the properties of the obtained system. It is expected that the addition of this etching tool will considerably enhance our capabilities for making photonic crystal structures as well as other photonic structures such as microdisk and microring-based integrated photonic structures.