Fabrication of oscillating metal probe for dynamic scanning microwave microscopy

Abstract

Abstract A microwave probe plays a critical role in near-field imaging, and there is a continuous effort to develop them through straightforward methods. This study designed and fabricated an oscillating metal probe and used it for scanning microwave imaging of micro-nano structures. The surface smoothness of the cantilever is approximately 19.3 nm after polishing with diamond abrasive paper, and the tip radius is less than 20 nm using electrochemical etching. The impact of metal electrode materials on microwave signals was assessed in the frequency range of 1–20 GHz. The microwave imaging capability of the devised probe was explored through the imaging of a micro-nano structure. The spatial resolution of microwave imaging reached 0.5 μm over a scanning area of 50 μm × 50 μm. This study has far-reaching significance for developing higher-performance microwave probes and advancing scanning microwave microscopy.