Abstract
Polysilanes are silicon-based polymers, which consist of silicon backbone and organic substituents. Among a kind of polysilanes, poly(di-methyl silane) [Si(CH3)2]n has the most fundamental structure, and is now commercially available. In this paper, poly(di-methyl silane) thin films are fabricated by means of vacuum evaporation technique. Orientation of the silicon backbone is well controlled by changing growth rate or substrate temperature during the evaporation. Using these polymer films and LiNbO3 substrates, layered surface acoustic wave (SAW) devices are fabricated, and the characteristics of SAW's propagating along the layered structures are numerically calculated. As a result, it is found that the SAW with large shear horizontal (SH) component is available, and these layered structures are suitable for liquid sensor, which detects the change in the physical constants of liquid loaded on the device surface.
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