Fabrication of multilayer ordered metallic nano-dot arrays by nano plastic forming and thermal dewetting process

Abstract

A new fabrication method of multilayer ordered nano-dot array structures with low cost is developed in this paper. As for the first layer, ordered Au nano-dot array is fabricated by nano plastic forming and thermal dewetting, and then it is coated with a SiO2 spacer layer. Multilayer nano-dot structures are produced by repeating Au coating, dewetting and SiO2 coating process. Effective parameters influencing formation of the second layer dots including Au layer thickness and SiO2 spacer layer thickness are investigated. Mechanism of second layer dots formation is also studied. It is confirmed that regular 3D nano-dot array can be obtained by optimizing the thickness of SiO2 spacer layer and Au layer. Keyword: Nanofabrication, Nano Plastic Forming, Nano-dot