Abstract
In order to realize cell patterning for the investigation of single-cell properties and cellular network analysis, we have been developing a micromanipulator array capable of massively parallel trapping and manipulation of single living cells. An array of hollow silicon dioxide (SiO 2) microneedles with a hemispherical tip shape was successfully fabricated by an anisotropic deep reactive ion etching (DRIE) process followed by wet oxidation. The hemispherical tip integrated to each microneedle was successfully structured by the positive use of notching effect in the DRIE process. Moreover, preliminary experiments revealed that fabricated microneedles have the ability to trap polymer particles with a diameter of approximately 10 μm, giving around 90% probability. It was also found that computational fluidic dynamics (CFD) analysis is potentially useful in estimating particle trapping.
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