Fabrication of Microelectrode by Current Density Control in Electrochemical Micromachining

Abstract

The fabrication technology of microelectrode in electrochemical micromachining (EMM) was presented. The high frequency short pulses current and current density control between the cathode and anode were synthetically utilized. The mechanism of pulses EMM was expatiated firstly. The shaping principle of microelectrode was analyzed. The current density control strategy was proposed based on the fundamental experimental behavior of electrochemical machining current with the gap variance. Then an experimental setup for EMM is constructed, which has machining process detection and current density control functions, also a pulses power supply and a control computer are involved in. After the technologic experiment analyzed, some microelectrodes with nice surface are fabricated successfully. This method could provide the simple electrode for further electro-machining or micro probe for scanning probe microscopy. Preliminary experimental results show the feasibility of EMM and its potential capability for better machining accuracy and smaller machining size.