Abstract
Metastable ZrO2−x particles were successfully prepared by inert gas condensation (IGC) process. To control oxygen vacancies in metastable ZrO2−x, the samples were annealed between 100 and 400 °C for 2 h under low oxygen partial pressures (PO2=10−15 Pa). After annealing, metastable ZrO2−x samples with various oxygen vacancies (0.26<x<0.81) were successfully fabricated; also, the particle sizes were less than 10 nm.
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