Abstract
Metastable ZrO 2 -x particles were successfully prepared by inert gas condensation (IGC) process. To control oxygen vacancies in metastable ZrO 2 -x, samples were annealed between 100°C and 400°C for 2 h under low oxygen partial pressures (PO 2 = 10-15 Pa). Therefore, metastable ZrO 2 -x samples with various oxygen vacancies (0.26 < x < 0.81) were successfully fabricated by IGC method; also, the particle sizes were less than 10 nm.
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