Fabrication of metallic patterns on polydimethylsiloxane using transfer technology: application to MRI microcoils

Abstract

Despite the large use of this material in the microsystem field, fabrication of metallic patterns on polydimethylsiloxane (PDMS) still remains a challenge. In this Letter, we present a new process based on the transfer principle and report its application to MRI microcoils. These double-side structures are well aligned and the transfer yield is higher than 90%. The limit of the working range for these flexible coils is a bending radius of 2%mm, similar to the radius of the coil. The developed process opens a wide range of further applications for flexible devices.