Abstract
We firstly investigated the effect of hydrogen radical treatment to fabricate metal nanoparticles as catalyst, which is used for synthesizing one dimensional nanostructure, from metal oxide film at low temperature as 200°C. The metal nanoparticles with spherical shape were successfully fabricated after hydrogen radical treatment. Their surface shapes were clearly changed with increasing the hydrogen radical treatment time at same temperature. In addition, silicon nanostructures after fabrication of metal nanoparticles were grown at varied temperatures. The ball- and wire-like silicon nanostructures at 200°C and 400°C were synthesized, respectively. Their structure depends strongly on the growth temperature.
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