Fabrication of metal-ceramic matrix composite multilayer coatings with diamond protective layer for heating elements in the vacuum systems

Abstract

We report a novel methodical approach to the design of multilayer composite coatings with a final diamond protective layer for vacuum applications, specifically for controlled heating in vacuum apparatus, cryogenic systems, and for space applications. Diamond is a promising option to add unique properties to such multilayers while maintaining fast and uniform heat distribution. The multilayer composite systems were based on the insulating layer - Al2O3, a Cu-based interconnect layer and a TiO2-based heating element. The study demonstrated the compactness and high temperature resistance of the developed composite system, which are necessary for real-world applications. To enhance the functional properties of the deposited multilayer coatings, diamond films were deposited on them using microwave plasma enhanced chemical vapor deposition (MPCVD). The diamond film was deposited as the last layer of the metal-ceramic multilayer coating prepared from various powders using high velocity oxygen fuel (HVOF) and atmospheric plasma spraying (APS) deposition techniques.