Abstract
This study explores the feasibility of using Cu/AZO thin films as low-emissivity materials with antibacterial properties, fabricated using the linear sputtering method. The linear sputtering technique deposits thin films onto continuous substrates, offering high throughput, uniform coatings, and precise control over film properties. In this research, Cu/AZO thin films underwent either vacuum annealing or hydrogen plasma annealing treatments. The Cu layer imparts antibacterial properties, while the AZO layer primarily provides thermal insulation. Experimental results show that annealing treatments enhance both photoelectric performance and antibacterial capability. Annealed Cu/AZO films exhibit lower resistivity and emissivity. Among the samples, those subjected to vacuum annealing at 400 °C are most suitable for low-emissivity applications, with an average visible light transmittance of 60%, an emissivity of 0.16, and an antibacterial activity value of 8.8. The Cu/AZO films proposed in this study effectively combine antibacterial and thermal insulation properties, making them relevant for the field of green materials.
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