Abstract
This article demonstrates the fabrication of large-scale micro-structures by two-photon polymerization with an integrated long-stroke precision stage. We first design a three-axial stage that combines a piezoelectric transducer stage and a stepper-motor stage, and we apply gain-scheduling and robust control with a feedforward compensator to achieve nano-positioning within a travel range of 10 cm. We then integrate the precision stage with a two-photon polymerization module to manufacture large-scale micro-structures, including 1 mm linear gratings, 1 cm parallel lines, and 200 µm Fresnel zone plates. We further define performance indexes to evaluate the qualities of these products: the linear gratings achieve an image error of 4.73%, while the 1 cm lines have an average error of 0.2 µm with a standard deviation of 0.05 µm, and the Fresnel zone plates attain a focal error of 0.4% and a focus efficiency of 64%. These results confirm the effectiveness of the proposed use of the precision stage and two-photon polymerization for large-scale micro-structure manufacturing.
Highlights
Precision positioning is increasingly important as technology develops and has been applied in industrial applications using advanced control techniques
The results showed that a modified sensor layout with loop-shaping robust controllers can achieve a root-mean-square error (RMSE) of 5 nm and a misalignment error of 16 nm for a 10 cm travel
We show the scanning electron microscope (SEM) images of these products to inspect the quality of these samples by the proposed performance indexes
Summary
Precision positioning is increasingly important as technology develops and has been applied in industrial applications using advanced control techniques. We integrate the combined stage with a TPP module to fabricate large-scale micro-structures, including 1 mm linear gratings, 1 cm parallel lines, and 200 mm FZPs. We further define performance indexes to discuss the fabrication qualities. In the x- and y-axis, as shown, we use a double-loop structure, in which the motor stage makes large displacements and the PZT stage provides subtle adjustments. The. misalignment errors of the encoders are compensated by a global interferometer sensor to improve manufacturing precision.[11] We apply the anti-locking function to prevent the PZT stage from exceeding its maximum stroke. We apply the combined stage to the TPP module to make the following micro-structures: linear.
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