Abstract
Lead zirconate titanate (PZT) thin films were prepared by a sol-gel method on platinized Si. Their microstructure and surface morphology were characterized by XRD and AFM. Phase transformations of the prepared PZT films from pyrochlore to ferroelectric were observed at 550 and 600°C for furnace and RTP annealing, respectively. Smaller scattering angle (2°) XRD results showed more pyrochlore phases in the near surfaces and PZT (100) nucleated in Pt substrate and transformed to the surfaces in FA annealing PZT films. Isolated ferroelectric phases in the surroundings of pyrochlore phases were fabricated in order to study size effect of laterally confined ferroelectric domains. The isolated ferroelectric phases in the diameter of about 400 nm were found in FA PZT films at 450°C. Piezoresponse mode of AFM shows complex ferroelectric domains in the isolated phase, not from the surroundings.
Published Version
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