Fabrication of horizontally grown silicon nanowires using a thin aluminum film as a catalyst

Abstract

We present a new method for the fabrication of horizontal silicon nanowires for application in nanoelectronic devices. A web of horizontally connected silicon nanowires is grown on a silicon substrate using a thin aluminum film as a catalyst. A thin layer of oxide is thermally grown on a silicon substrate. The oxide layer is then selectively etched using photolithography. A thin layer of aluminum is thermally evaporated on the substrate with the patterned oxide layer. When the sample is annealed above the eutectic temperature, we show that the silicon gets deposited along the grain boundaries of aluminum in the form of thin nanowires. We show that this phenomenon is due to the high solubility of silicon in aluminum at high temperatures. The surface morphology was analyzed using Scanning Electron Microscopy (SEM). The compositional analysis was done using Energy Dispersive X-ray spectroscopy (EDX).