Abstract
Double-end clamped beam is one of the most important miniaturized structures in micro-electromechanical systems (MEMS). In recent years, they have achieved extensive application in a variety of fields, including environmental monitoring, food detection, and disease diagnosis, since they have high sensitivity, high throughput, good specification and fast response. To meet the market demand for precise three-dimensional microstructures and tiny device sizes，the rationalization of the process design of micro-nano technology is essential. In previous research, the function of the microcantilever sensor was finally realized through eight lithography cycles. High performance piezoresistive microcantilever arrays were successfully developed with a yield of 90% in our work. In this paper, a hollow composite microfluidic double-end clamped beam structure is proposed, a reasonable process flow is developed. Simulations show that the hollow microfluidic structure’s sensitivity can reach the order of 10–12 g, and the quality factor is nearly stable above 10,000. It is crucial for the development of double-end clamped beam sensors because it offers a low-cost, portable, and rapid detection method for the detection of biomolecules.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Proceedings of the Romanian Academy, Series A: Mathematics, Physics, Technical Sciences, Information Science
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
