Abstract
The physical and technical characteristics, structural and topological aspects of the micromechanical thermo-resistor active heating transdusers synthesis for fluid (gas and liquid) parameters determination are considered. All transducers are based on a single MEMS (Micro Electro Mechanical System) structure and differ in functionality due to different operating modes and different principles for determining fluid parameters. It allows the development of multifunctional sensors based on a single hardware, which includes a typical MEMS structure and mass production microprocessor, for example, PSoC (Programmable System On Chip). The transducers mathematical models acceptable for the COMSOL simulation library and designing of information electronics devices with the registration of various physical parameters are proposed. The analytical calculations on the basis of the proposed models for a gas flow sensor of the temperature dependence from the fluid flow velocity in the MEMS structure was performed. The proposed models can be used for the operation analytical description and computing of devices based on the use of thermoelectric processes in micro-scale structures. Ref. 29, fig. 3.
Highlights
Development of the sensing device for any physical parameter and carrying out of scientific researches with its using imply the both sensor and research field detailed elaboration [1,2,3,4,5,6]
We have analysed conductive and convective heat transfer in the typical structural elements of the thermally insulated structure (TIS) according to the Fig. 1 taking into account the simplified heater geometry like a beam placed on a closed dielectric membrane
All considered transducers are based on a single Micro Electro Mechanical System (MEMS) structure and differ in functionality due to different operating modes and different principles for determining fluid parameters
Summary
Development of the sensing device for any physical parameter and carrying out of scientific researches with its using imply the both sensor and research field detailed elaboration [1,2,3,4,5,6]. Modern researches is hardly to imagine without the active use of software products based on basic mathematical models to formalize a process of semiconductor individual element design and a converter synthesis as a whole [3, 6]. Such information and analytical systems with a communication interface are developed for circuit design and do not affect the design and technological constraints of particular classes of semiconductor structures. This is an unsolved part of sensing device synthesis task for the both scientific purposes and educational ones for devices based on MEMS structures using electrothermal phenomena
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