Abstract
YBaCuO thick films were fabricated by plasma enhanced chemical vapor deposition, and the crystallinity and the superconducting properties were investigated. The growth temperature to obtain the thick films was decreased by around 150<TEX>$^{\circ}C$</TEX> due to plasma enhancement. The zero resistivity temperatures for films grown at 590<TEX>$^{\circ}C$</TEX> and 620<TEX>$^{\circ}C$</TEX> were 55 and 80 K, respectively.
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