Abstract
A novel inorganic-organic hybrid polymer polysiloxane-liquid (PSQ-L) is introduced for defining waveguides. The PSQ-L polymer film shows good optical properties and high thermal stability. The all polymer microring resonator is fabricated by conventional lithography and ICP etching process. About 3-dB extinction ratio from the through port and 23-dB extinction ratio from the drop port are obtained. A high Q value of 5.7×104 is obtained. The optical loss of the bending waveguides is estimated to be 1.6 dB/cm. The high Q polymer ring resonators show potential in sensing applications.
Full Text
Paper version not known (
Free)
Published Version
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call