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Abstract
Because of its large electromechanical coupling coefficient, LiNbO3 is attractive as a substrate forsurface-acoustic-wave (SAW) devices. However, the fabricationof interdigital transducers with metal line widths of a fewhundred nanometres or less on LiNbO3 using electron-beamlithography is difficult as the material is not conductive. Wepropose an alternative method to produce high-frequency SAW transducers on the insulating substrate as well as on aconductive substrate. We demonstrate that SAW delay lines thatoperate in the GHz range can be fabricated using nanoimprintlithography.
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