Abstract
Fabrication of GaN Topological Photonic Crystal Membranes in Visible Wavelength Region by Combination Process of HEATE and Wet Etching
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https://doi.org/10.7567/ssdm.2021.k-1-08
Publication Date: Sep 7, 2021 |
Fabrication of GaN Topological Photonic Crystal Membranes in Visible Wavelength Region by Combination Process of HEATE and Wet Etching
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