Fabrication of fluorescent oxygen gas-sensor probe module based on asymmetric 1 × 2 optical waveguides using UV imprint lithography

Seung-Hun Oh,Ki-Do Ahn,Hyun-Young Choi

doi:10.1117/1.oe.58.9.097104

Seung-Hun Oh, Ki-Do Ahn + Show 1 more

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https://doi.org/10.1117/1.oe.58.9.097104

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Abstract

We proposed and developed an integrated fluorescent oxygen gas-sensor probe module based on asymmetric 1 × 2 optical waveguides that can transmit power from an optical source and the fluorescence signal with high efficiency simultaneously. The fluorescent oxygen gas-sensor comprises an optical source part, optical detector part, and optical sensing probe part. The optical sensing probe comprises asymmetric 1 × 2 optical waveguides coated with an oxygen-sensitive fluorescent film on the end face of the optical waveguide. This optical probe module can transmit the optical power and fluorescence signal with high efficiency because of the same optical path for transmission of the optical source and the fluorescence signal. In addition, this structure facilitates an integrated miniature oxygen-sensor module. We optimally designed the asymmetric 1 × 2 optical waveguides with an asymmetric structure and different two core size. Then, we fabricated the polymeric asymmetric optical waveguides using the UV imprint lithography process suitable for cost-effective mass production. The optical oxygen-sensor probe transmitted the optical source power and the fluorescence signal with 80% and 82% efficiency, respectively. An oxygen-sensitive fluorescent film was coated on the end face of the optical waveguide by using the spray coating method. The oxygen-gas detection sensor constructed using this optical probe module with 1 × 2 asymmetric optical waveguides could measure the concentration with 0.3% resolution for a gas concentration range of 0% to 25%. This optical oxygen-sensor probe module facilitates a compact, simple, and cheap measurement system.

Highlights

Almost all living organisms use oxygen for breathing and energy generation
We developed the oxygen-sensor probe module by coating a sol–gel solution mixed with optimum ruthenium concentration on the end face of the output channel in the asymmetric 1 × 2 optical waveguides
4 Conclusion We proposed and developed an integrated fluorescent oxygen gas-sensor probe module based on asymmetric 1 × 2 optical waveguides, which can simultaneously transmit the power of the optical source and the fluorescence signal with high efficiency, using UV imprint lithography

Summary

Introduction

Almost all living organisms use oxygen for breathing and energy generation. monitoring oxygen is a very important factor applied in a wide range of areas, such as biology, environment, medicine, and maritime affairs.[1]The methods of measuring oxygen concentration, such as the classic Winkler titration, electrical analysis, pressurebased measurement, and optical method based on the fluorescence technique, are still being studied.[2]The classic Winkler titration has been employed for the measurement of oxygen for many years and is considered, to some extent, the standard method. The electrical analysis method has the problem of specificity since it reacts with other gases such as chlorine, ozone, and nitrogen oxides.[3] On the other hand, fluorescence-based oxygen measurement has high detection resolution; the concentration can be measured in real-time, and it enables opticalfiber-based monitoring. As such, it is widely used in chemistry,[4] medicine,[5] and areas that monitor atmospheric or water quality.[6]

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