Fabrication of Fine AlN Particles by Pulverizing with Very Small ZrO2 Beads

Abstract

Nano‐sized aluminum nitride (AlN) powders can enhance the sinterability of AlN ceramics. The present work examined the pulverization and dispersion of AlN powder using ZrO2 beads of 0.1 mm in diameter as grinding medium in order to obtain nano‐sized powder for low‐temperature sintering. An attracting feature of the bead grinding is that the rotor creates centrifugal and shearing forces, which lead to efficient pulverization that exceeds the conventional grinding limit. The AlN powder with agglomerates and average particle size of 0.38 μm was broken up into more homogeneous particles with a narrow particle size distribution after 90 min of grinding. Qualitative examinations of the powder by transmission electron microscopy and BET indicated that the particle size was 50–100 nm and specific surface area was 70 m2/g.