Abstract
The design and fabrication of a Micro-electromechanical Systems (MEMS)-based tilted microcoil on a polyimide capillary are reported in this paper, proposed for an electromagnetically-driven single-fiber endoscope scanner application. The parameters of the tilted microcoil were optimized by simulation. It is proved that the largest driving force could be achieved when the tilt-angle, the pitch and the coil turns of the designed microcoil were 60°, 80 µm and 20, respectively. The modal simulation of the designed fiber scanner was carried out. The prototypes of the tilted microcoils were fabricated on the surface of polyimide capillary with 1 mm-diameter using our developed cylindrical projection lithography system. The dimensions of the two tilted microcoils were as follows: one was tilt-angle 45°, line width 10 ± 0.2 µm, coil pitch 78.5 ± 0.5 µm, and the other was tilt-angle 60°, line width 10 ± 0.2 µm, coil pitch 81.5 ± 0.5 µm. Finally, a direct mask-less electroplating process was employed to fabricate the copper microcoil with 15 µm thickness on the gold (Au) seed-layer, and the corresponding line width was expanded to 40 µm.
Highlights
Miniature devices have been developed extensively for medical and biological applications.Recently, to inspect the imaging within blood vessel and lactiferous ducts inside animal and human body, ultra-thin medical endoscopes have been developed by shrinking the overall diameter of the devices [1,2]
Tadao et al [2] reported an electromagnetically-driven ultra-miniature single-fiber scanner that was actuated by tilted microcoils fabricated on cylindrical substrates using a laser point exposure system
The developed cylindrical projection lithography method can be used for directly patterning tilted microcoil on the surface of a polyimide capillary as an electromagnetically-driven actuator
Summary
Miniature devices have been developed extensively for medical and biological applications. In order to improve the imaging quality, a smaller diameter, rapid-scanning and high-resolution optical scanner with a single fiber has recently been developed. Weber et al [7] developed a single-fiber scanner, which employed a micro-mirror and a micro-motor to realize linear and rotated scanning, and the outer diameter of the assembled system was. Weber et al [9] presented an endoscopic probe with a forward-looking piezoelectric fiber scanner with an outer diameter of 2.5 mm. Tadao et al [2] reported an electromagnetically-driven ultra-miniature single-fiber scanner that was actuated by tilted microcoils fabricated on cylindrical substrates using a laser point exposure system. The developed cylindrical projection lithography method can be used for directly patterning tilted microcoil on the surface of a polyimide capillary as an electromagnetically-driven actuator. The fabrication and characterization of the tilted microcoils are presented
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