Fabrication of complex three-dimensional nanostructures using focused ion beam and nanomanipulation

Abstract

In this article, the authors present a fabrication/assembly method that grants the ability to create complex three-dimensional (3D) nanostructures. This method uses a combination of micro- and nanomachining capabilities with a focused ion beam (FIB) and six degrees of freedom (DOFs) 3D nanomanipulator. A dual beam of scanning electron microscope and a FIB system was used to ion beam mill a silicon piece in order to create tethered structures. Various 3D structures were further processed by the ion beam milling process and platinum chemical vapor deposition unit to form sub-100-nm features. The gas assisted deposition system was used to create a convex shape on the nanoairplane using the gray scale image digital patterning system. The six DOFs nanomanipulator was used to pick, rotate, and place the nanoflags onto the FIB defined Texas and United States maps made by the FIB. In addition, a multiwalled carbon nanotube was used as a flag pole, and then it was attached to a scanning probe microscope tip. The tip was then actuated to tapping mode to demonstrate the nanoflag waving. The assembly technique was also utilized to manipulate individual 100 nm polystyrene microspheres.