Abstract
The fabrication and first results of a capacitive type chemical sensor based on a silicon/polymer bimorph structure are described. Upon exposure to analytes the polymer covering the thin silicon membrane swells inducing a deflection on the membrane which is measured as a capacitance change between membrane and substrate. Five different polymer layers [poly-hydroxy-ethyl-methacrylate (PHEMA), poly-methyl-methacrylate (PMMA), poly-vinyl-acetate (PVAc), epoxy-novolac (EPN) and poly-dimethylsiloxane (PDMS)] are examined. Exposure to water, methanol and ethanol vapors is used to evaluate performance. Sensitivities ranging from 4.5fF/%RH for PDMS up to 29fF/%RH for PHEMA covered devices are reported. Devices covered with PHEMA, PVAc and PMMA also exhibit strong response upon exposure to methanol and ethanol atmospheres. Differences in sensitivities between these layers may be exploited in constructing an effective chemical discriminating array.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
