Abstract
SrZrO3 thin films grown by pulsed laser deposition onSrRuO3-bufferedSrTiO3 substrates have been investigated by means of x-ray diffraction, atomic force microscopy andRutherford backscattering spectroscopy. The compressive stress originated in the coherentSrZrO3/SrRuO3 interface due to the lattice mismatch () forces epitaxial SrZrO3 to grow in a three-dimensional habit. So-depositedSrZrO3 is used to fabricate nanoarrays of dielectric wires from a nanopatternedSrRuO3 surface. The influence of the geometric shadowing effect producedby the non-perpendicular incidence of the ablated particles on theSrZrO3 growth habit is discussed.
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