Abstract
We fabricated multilayer aluminum (Al) and gallium (Ga) codoped ZnO (AGZO) transparent conductive films by spin coating and annealing. By cross-sectional transmission electron microscopy (TEM), single-layer AGZO films were found to be discontinuous, and their glass substrates were unfavorably exposed. On the other hand, the area of discontinuous regimes clearly decreased in the double-layer AGZO films, which we fabricated by recoating an AGZO precursor solution on a single-layer AGZO film and annealing the recoated samples. Moreover, the sheet resistances of the multilayer AGZO films decreased from a single-layer AGZO film to a triple-layer AGZO film and was constant for the triple- to quintuple-layer AGZO films. This clearly indicates that the undesired discontinuous regions of the AGZO films were completely improved in the triple-layer AGZO films. In addition, the transmittance of triple-layer AGZO films can be improved by SC-1 substrate cleaning. Consequently, the triple-layer AGZO structure is optimal for fabricating optimal transparent conductive films.
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