Fabrication of a novel piezoelectric actuator with high load-bearing capability

Abstract

A lot of piezoelectric ceramic researchers have been devoted to the development of piezoelectric actuator with enhanced axial displacement as well as excellent load-bearing capability. The piezoelectric actuator with dome-shaped structure possesses higher axial displacement, such as RAINBOW and THUNDER. In this study, a new method for producing piezoelectric actuator with enhanced load-bearing capability has been developed. The manufacturing process is better than the fabrication of the RAINBOW and THUNDER type actuator. The novel piezoelectric actuator module was made up by nickel electroplating on one side of the stainless steel substrate glued with the PZT patch on the other side. It is observed that by electroplating process the load-bearing capability is significantly enhanced while the actuating displacement is somewhat decreased. For example, with 60 min electroplating on the substrate of the actuator, the load-bearing ability is increased by 4.7 multiples whereas the maximum output displacement is only decreased by 20.2%.