Fabrication of a microlens array in BK7 through laser ablation and thermal treatment techniques

Abstract

We propose a laser-based method for fabricating microlens on borosilicate glass substrates. The technique is composed by a laser direct-write technique using a Nd : YVO4 for fabricating the microlens arrays and a post thermal treatment with a CO2 laser for improving its morphological and optical properties. The proposed technique will allow us to obtain microlenses with a broad range of diameters (50μm-500μm) and focal lengths (1mm-5mm). By combining laser direct-write and the thermal treatment assisted by a CO2 laser, we are able to obtain good quality elements.