Abstract
In this paper, a nanofabrication technology of alumina self-organization method for deep and self-arranged nanometer holes on high purity aluminum is presented. Deep and self-arranged nanometer holes can be used as antireflection structures, polarizing elements, guided-mode resonance filters and high efficiency diffraction optical elements. The fabrication technology provided an effective method for low-cost, large-scale manufacturing high aspect ratio nanoholes.The deep nanoholes structure is fabricated by two anodizing processes on aluminum. The theoretical calculation of reflectivity for the fabricated deep holes G-solver sofeware while the measurement setup for the reflectivity of the deep nanoholes is self-made optical parameter test system.The results show that the calculated reflectivity of the deep holes is below 8.0% within the visible wavelength range, while the measured reflectivity of the fabricated nanometer holes is under 8.30% within the wavelength range of 400-760nm and it agrees well with the theoretical analysis result.
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