Abstract
The feasibility of two types of all-telluride integrated optics devices being able to single-mode guiding of light in the spectral ranges [6-11 µm] and [10-20 µm], respectively, has been demonstrated. The so-called “rib” waveguides show a several micron thick Te82Ge18 film deposited onto a Te75Ge15Ga10 bulk glass substrate by thermal co-evaporation and further etched by reactive ion etching in CHF3/O2/Ar atmosphere. The obtained structures were proved to behave as channel waveguides with a satisfactory confinement of light in the whole spectral ranges. These results allowed validation of our technological solution for the fabrication of micro-components for spatial interferometry.
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