Abstract
The feasibility of telluride based single-mode waveguides being able to guide light in the infrared region [1–16μm] is demonstrated. The rib waveguides comprise a silicon substrate, two Te–Ge–Se films deposited by thermal co-evaporation. The first one plays the role of a cladding layer while the second is the core layer. In order to control the light confinement, the second layer is further etched by reactive ion etching in CHF3/O2/Ar atmosphere. The obtained structures behaved as channel waveguides with a single-mode transmission demonstrated at 1.55μm. Transmission optical losses were evaluated by the cut-back method on the very first prototypes and were comprised between 0.6 and 1.8dBcm−1.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.