Abstract
A thin film pressure sensor was fabricated and tested to a high pressure of 40,000 psi. The MEMS fabrication process utilized a 0.5 μm film of sol-gel deposited PZT (PbZr0.52Ti0.48O3) and platinum metallization for the top and bottom electrodes. The sensor was mounted on a customized stainless steel housing and placed into a high-pressure vessel for both calibration and testing. The sensor responded non-linearly to the applied pressure and generated a charge of 202 pico coulombs at the maximum tested pressure of 40,000 psi. The shape and configuration of the Pt/PZT/Pt structure has been redesigned to correct for the non-linear response and to increase the charge output of the device.
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