Abstract
The use of sensors made of thin films has several advantages over wire or foil sensors. Thin film pressure sensors can be used in high temperature, vibration and other special environment with small volume, high sensitivity and stability. Thin film pressure sensors can be made by magnetron sputtering. In this paper the thin film pressure sensors are prepared by elastic Element polishing, growth of dielectric film, NiCr alloy and Ni films with magnetron sputtering, the process and results are analyzed.
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